The influence of the reaction kinetics of O2 and source flow rates on the uniformity of boron and arsenic diffusions : P. C. Parekh, D. R. Goldstein and T. C. Chan. Solid St. Electron.14 (1971), p. 281

• Publisher: Elsevier Science
• Year: 1971
• Tongue: English
• Weight: 110 KB
• Volume: 10
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(71)90077-1