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The influence of reaction kinetics between BBr3 and O2 on the uniformity of base diffusion : P. C. Parekh and D. R. Goldstien, Proc. IEEE 57, No. 9, September (1969), p. 1507


Publisher
Elsevier Science
Year
1970
Tongue
English
Weight
213 KB
Volume
9
Category
Article
ISSN
0026-2714

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