The influence of the physicochemical characteristics of the substrate surface on the deposited TiN film properties
✍ Scribed by M. Milić; M. Milosavljević; N. Bibić; N. Popović; Ž. Bogdanov
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 793 KB
- Volume
- 163
- Category
- Article
- ISSN
- 0040-6090
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