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The influence of the physicochemical characteristics of the substrate surface on the deposited TiN film properties

✍ Scribed by M. Milić; M. Milosavljević; N. Bibić; N. Popović; Ž. Bogdanov


Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
793 KB
Volume
163
Category
Article
ISSN
0040-6090

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