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The influence of the microstructure on the thermal stability of a-Si1−xNx: H films

✍ Scribed by A.A. Aivazov; B.G. Budaguan; A.Yu. Sazonov


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
480 KB
Volume
193
Category
Article
ISSN
0921-4526

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