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The influence of the magnetic field on ion impact on the cathode of a sputtering magnetron discharge

โœ Scribed by Li, Jun; Chen, Qing-Ming; Zhang, Wang; Li, Zai-Guang; Pan, J J


Book ID
121434478
Publisher
Institute of Physics
Year
1996
Tongue
English
Weight
191 KB
Volume
29
Category
Article
ISSN
0022-3727

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