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The influence of the electron transport cross sectional shape on electron energy distribution functions in DC and microwave plasmas

✍ Scribed by Karoulina, E V; Lebedev, Yu A

Book ID: 121381541
Publisher: Institute of Physics
Year: 1988
Tongue: English
Weight: 669 KB
Volume: 21
Category: Article
ISSN: 0022-3727
DOI: 10.1088/0022-3727/21/3/006

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