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The influence of rf induced bias on the properties of diamond-like carbon films prepared using ECR-CVD

✍ Scribed by S. F. Yoon; H. Yang; Rusli; J. Ahn; Q. Zhang

Book ID
107457796
Publisher
Springer US
Year
1998
Tongue
English
Weight
202 KB
Volume
27
Category
Article
ISSN
0361-5235

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