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The influence of processing gas on the mechanical properties of sputtered B–C–N–H films

✍ Scribed by Youming Chen; Shengrong Yang; Junyan Zhang

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 622 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.06.024

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