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The influence of laser-induced surface modifications on the backside etching process

✍ Scribed by K. Zimmer; R. Böhme; D. Ruthe; B. Rauschenbach

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
649 KB
Volume
253
Category
Article
ISSN
0169-4332

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Laser induced backside dry etching method (LIBDE) was developed -analogously to the well-known laser induced backside wet etching (LIBWE) technique -for the micromachining of transparent materials. In this procedure, the absorbing liquid applied during LIBWE was replaced with solid metal layers. Fus