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The influence of ion implantation conditions on depth distribution and retention of implanted impurities

โœ Scribed by Z.A. Iskanderova; T.D. Radjabov; R.Ju. Leiderman; G.R. Rakhimova; F.K. Tukfatullin


Book ID
113277556
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
964 KB
Volume
14
Category
Article
ISSN
0168-583X

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