The influence of fast electrons on the formation of structure in film-deposits during cathodic sputtering in gas discharge: A I Krokhina et al, Izv AN SSSR Ser Fiz, 35 (2), 1971, 418–420 (in Russian)

• Publisher: Elsevier Science
• Year: 1972
• Tongue: English
• Weight: 172 KB
• Volume: 22
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(72)91009-3