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The coefficient of cathodic sputtering in discharges with oscillating electrons: E M Reykhrudel et al, Izv AN SSSR Ser Fiz, 35 (2), 1971, 414–417 (in Russian)

Publisher: Elsevier Science
Year: 1972
Tongue: English
Weight: 173 KB
Volume: 22
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(72)90984-0

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