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The influence of experimental procedures on the structural and magnetic properties of RF sputtered Fe–N thin films

✍ Scribed by H.M. Du; P. Wu; E.Y. Jiang; Z.Q. Li; C. Zhao; H.L. Bai

Book ID
113723581
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
445 KB
Volume
292
Category
Article
ISSN
0304-8853

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## Abstract Transparent conducting, aluminium doped zinc oxide thin films (ZnO:Al) were deposited by radio frequency (RF) magnetron sputtering. The RF power was varied from 60 to 350 W whereas the substrate temperature was kept at 160 °C. The structural, electrical and optical properties of the as‐