CaO buffer layer for the growth of ZnO t
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Y.S. Lim; J.S. Jeong; J. Bang; J. Kim
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Article
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2010
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Elsevier Science
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English
⚖ 1001 KB
We report the effect of CaO buffer layers on the structural properties of sputter-grown ZnO thin films. X-ray diffraction patterns indicated that enhanced crystallinity and alleviated compressive strain in the ZnO thin film were achieved by inserting a very thin CaO buffer layer between ZnO and the