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The influence of argon addition on the deposition and properties of Si:H, Cl films prepared in a glow discharge

✍ Scribed by G. Bruno; P. Capezzuto; G. Cicala; F. Cramarossa


Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
267 KB
Volume
135
Category
Article
ISSN
0040-6090

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