The importance of non-local shadowing for the topography evolution of a-C:H films grown by toluene based plasma enhanced chemical vapor deposition

✍ Scribed by C. Hormann; S. Meier; M. Moseler

• Book ID: 111622981
• Publisher: Springer
• Year: 2009
• Tongue: English
• Weight: 413 KB
• Volume: 69
• Category: Article
• ISSN: 1434-6036
• DOI: 10.1140/epjb/e2009-00131-6