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The Impact of HCl Precleaning and Sulfur Passivation on the Al 2 O 3 /Ge Interface in Ge Metal-Oxide-Semiconductor Capacitors

✍ Scribed by Xue, Bai-Qing; Chang, Hu-Dong; Sun, Bing; Wang, Sheng-Kai; Liu, Hong-Gang


Book ID
120688274
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
851 KB
Volume
29
Category
Article
ISSN
0256-307X

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