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The hardnesses and elastic moduli of pulsed laser deposited multilayer AlN/TiN thin films

โœ Scribed by T.A. Rawdanowicz; V. Godbole; J. Narayan; J. Sankar; A. Sharma


Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
289 KB
Volume
30
Category
Article
ISSN
1359-8368

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