The growth of metallic multilayers on semiconductor substrates and in-situ optical monitoring: the case of Co/Cu on silicon with Pb impurity

✍ Scribed by P. Armour; C.M. Emmerson; T.-H. Shen; S.D. Evans; B.D. Rainford

• Book ID: 108389331
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 418 KB
• Volume: 318
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(97)01159-0