The Growth of 3-Inch 4H-SiC Si-Face Epitaxial Wafer with Vicinal Off-Angle

✍ Scribed by Masumoto, Keiko; Kojima, Kazutoshi; Okumura, Hajime

• Book ID: 120830732
• Publisher: Trans Tech Publications, Ltd.
• Year: 2013
• Tongue: English
• Weight: 460 KB
• Volume: 740-742
• Category: Article
• ISSN: 1662-9752
• DOI: 10.4028/www.scientific.net/MSF.740-742.193