Suppression of short step bunching generated on 4H–SiC Si-face substrates with vicinal off-angle

✍ Scribed by Masumoto, Keiko; Tamura, Kentaro; Kudou, Chiaki; Nishio, Johji; Ito, Sachiko; Kojima, Kazutoshi; Ohno, Toshiyuki; Okumura, Hajime

• Book ID: 121973900
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 672 KB
• Volume: 401
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/j.jcrysgro.2014.02.037