The Geometry Effect of Contact Etch Stop Layer Impact on Device Performance and Reliability for 90-nm SOI nMOSFETs

✍ Scribed by Chieh-Ming Lai; Yean-Kuen Fang; Chien-Ting Lin; Wen-Kuan Yeh

• Book ID: 114618481
• Publisher: IEEE
• Year: 2006
• Tongue: English
• Weight: 457 KB
• Volume: 53
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2006.883818