✦ LIBER ✦
The impacts of high tensile stress CESL and geometry design on device performance and reliability for 90 nm SOI nMOSFETs
✍ Scribed by Chieh-Ming Lai; Yean-Kuen Fang; Chien-Ting Lin; Chia-Wei Hsu; Wen-Kuan Yeh
- Book ID
- 108210635
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 533 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0026-2714
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