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The formation of amorphous films

โœ Scribed by Klaus H. Behrndt


Book ID
118919147
Publisher
Elsevier Science
Year
1970
Tongue
English
Weight
26 KB
Volume
2
Category
Article
ISSN
0022-3093

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Nanovoid formation by change in amorphou
โœ M. Tane; S. Nakano; R. Nakamura; H. Ogi; M. Ishimaru; H. Kimizuka; H. Nakajima ๐Ÿ“‚ Article ๐Ÿ“… 2011 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 797 KB

The formation mechanism of a high density of nanovoids by annealing amorphous Al 2 O 3 thin films prepared by an electron beam deposition method was investigated. Transmission electron microscopy observations revealed that nanovoids $1-2 nm in size were formed by annealing amorphous Al 2 O 3 thin fi