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Nanovoid formation through the annealing of amorphous Al2O3 and WO3 films

✍ Scribed by R. Nakamura; T. Shudo; A. Hirata; M. Ishimaru; H. Nakajima

Book ID
113898732
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
440 KB
Volume
64
Category
Article
ISSN
1359-6462

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πŸ“œ SIMILAR VOLUMES

Nanovoid formation by change in amorphou
Nanovoid formation by change in amorphous structure through the annealing of amorphous Al2O3 thin films
✍ M. Tane; S. Nakano; R. Nakamura; H. Ogi; M. Ishimaru; H. Kimizuka; H. Nakajima πŸ“‚ Article πŸ“… 2011 πŸ› Elsevier Science 🌐 English βš– 797 KB

The formation mechanism of a high density of nanovoids by annealing amorphous Al 2 O 3 thin films prepared by an electron beam deposition method was investigated. Transmission electron microscopy observations revealed that nanovoids $1-2 nm in size were formed by annealing amorphous Al 2 O 3 thin fi