๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

The equipment for and process of metal ion beam enhanced deposition

โœ Scribed by Guoqing Li; Xiaowei Su; Zexiang Gong; Bangzhi Liu; Xueya Wen; Tengcai Ma


Book ID
103632092
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
462 KB
Volume
66
Category
Article
ISSN
0257-8972

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This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that