The thermal decomposition of triethylarsine (TEAS) has been studied. It decomposes at a lower temperature than arsine (AsH3). The decomposition proceeds via a radical process at a temperature above 700Β°C. Epitaxial growth using TEAs has been investigated. A gallium arsenide (GaAs) layer with good mo
The epitaxial growth of AlGaAs using highly purified trimethylaluminum
β Scribed by T Maeda; M Hata; M Isemura; T Yako
- Publisher
- John Wiley and Sons
- Year
- 1991
- Tongue
- English
- Weight
- 364 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0268-2605
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