Growth and characterization of heavily d
β
R. Scala; M. Porrini; G. Borionetti
π
Article
π
2011
π
John Wiley and Sons
π
English
β 298 KB
π 1 views
## Abstract Silicon crystals grown with the Czochralski method are still the most common material used for the production of electronic devices. In recent years, a growing need of large diameter crystals with increasingly higher doping levels is observed, especially to support the expanding market