✦ LIBER ✦

The electron beam fabrication of small geometry transistors

✍ Scribed by M.W. Larkin; R.K. Matta

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 576 KB
Volume: 10
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(67)90048-2

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