✦ LIBER ✦
The electron beam fabrication of small geometry transistors : M. W. Larkin and R. K. Matta, Solid-St. Electron.10 (1967), p. 491
- Publisher
- Elsevier Science
- Year
- 1968
- Tongue
- English
- Weight
- 93 KB
- Volume
- 7
- Category
- Article
- ISSN
- 0026-2714
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