A study on the microstructure and electr
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Jung-Ho Yoo; Seok-Woo Nam; Sung-Kwan Kang; Yun-Ha Jeong; Dae-Hong Ko; Ja-Hum Ku;
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Article
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2001
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Elsevier Science
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English
⚖ 947 KB
We investigated the evolution of microstructures and the electrical properties of CeO thin films deposited by the reactive 2 DC magnetron sputtering method on the (100) silicon substrate upon annealing in the O gas ambient. The CeO thin films 2 2 deposited at 3008C were polycrystalline. After anneal