✦ LIBER ✦

The effects of process conditions and substrate on copper MOCVD using liquid injection of (hfac)Cu(vtmos)

✍ Scribed by Chi-Hoon Jun; Youn Tae Kim

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

The effect of carrier gas and H(hfac) on

✍ W. H. Lee; Y. K. Ko; J. H. Choi; I. J. Byun; H. T. Kwak; D. H. Kim; S. W. Rhee; 📂 Article 📅 2001 🏛 Springer US 🌐 English ⚖ 651 KB