✦ LIBER ✦
The effect of carrier gas and H(hfac) on MOCVD Cu films using (hfac)Cu(1,5-COD) as a precursor
✍ Scribed by W. H. Lee; Y. K. Ko; J. H. Choi; I. J. Byun; H. T. Kwak; D. H. Kim; S. W. Rhee; P. J. Reucroft; J. G. Lee
- Book ID
- 110609372
- Publisher
- Springer US
- Year
- 2001
- Tongue
- English
- Weight
- 651 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0361-5235
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