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The effects of nucleation and growth on epitaxy in the CoSi2/Si system

✍ Scribed by J.M. Gibson; J.C. Bean; J.M. Poate; R.T. Tung


Publisher
Elsevier Science
Year
1982
Tongue
English
Weight
860 KB
Volume
93
Category
Article
ISSN
0040-6090

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