The effects of methane concentration in hydrogen on the microstructure and properties of diamond films grown by hot-filament chemical vapour deposition
โ Scribed by C.V. Cooper; C.P. Beetz Jr.
- Book ID
- 107930179
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 726 KB
- Volume
- 47
- Category
- Article
- ISSN
- 0257-8972
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๐ SIMILAR VOLUMES
Synthetic diamond particles were deposited on a Si (1 0 0) substrate using a hot-filament chemical-vapour-deposition method in order to study the effect of the reaction pressure on the nucleation behaviour. The reaction pressure was controlled, as an experimental variable, from 2 to 50 torr under th
We report on the effects of deposition pressure P d on the growth and properties of the B-doped nanocrystalline silicon (nc-Si:H) thin films grown by hot-wire chemical vapor deposition (HWCVD) at very high hydrogen dilution of 98.8%. We found that the crystallinity of nc-Si:H or mc-Si:H films is not