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The effects of impurities on the light-induced degradation of hydrogenated amorphous silicon

โœ Scribed by J. David Cohen; Thomas Unold


Publisher
Elsevier Science
Year
1991
Weight
511 KB
Volume
30
Category
Article
ISSN
0379-6787

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Effect of hydrogen dilution in silane on
โœ P.K. Acharya; H.D. Banerjee; K.L. Chopra; S.C. Saha; Swati Ray ๐Ÿ“‚ Article ๐Ÿ“… 1994 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 362 KB

Hydrogenated amorphous silicon films (a-Si:H) have been deposited by r.f. glow discharge of silane (Sill 4) and hydrogen (H 2) gas mixture. The hydrogen concentration in the gas mixture and the applied r.f. power density have been varied. The initial photoconductivity (crp), photosensitivity (%/~d),