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The effect of water vapour on atom production by glow-discharge sputtering

โœ Scribed by P.L. Larkins

Book ID
113374642
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
739 KB
Volume
46
Category
Article
ISSN
0584-8547

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A new method of sputtered depth determination was evaluated for glow discharge (GD) analysis of solid samples. Although sputter analysis methods like GD may characterize samples in terms of both composition and spatial (depth) distribution of those components, quantitative analysis may suffer signif