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The effect of tungsten and boron on the Cu barrier and oxidation properties of thin electroless cobalt–tungsten–boron films

✍ Scribed by Hila Einati; Vadim Bogush; Yelena Sverdlov; Yuri Rosenberg; Yosi Shacham-Diamand


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
247 KB
Volume
82
Category
Article
ISSN
0167-9317

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