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The effect of TiN interlayers on the indentation behavior of diamond-like carbon films on alloy and compound substrates

โœ Scribed by C.V. Cooper; P. Holiday; A. Matthews

Book ID
107930383
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
853 KB
Volume
63
Category
Article
ISSN
0257-8972

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A method to evaluate the substrate effect quantitatively in film indentation is proposed. For the thin film deposited on the substrate, the power function relationship is used to describe the loading curve of the film indentation behavior. The loading curve exponent of the power function which is th