The effect of the substrate temperature on extended defects created by hydrogen implantation in germanium

✍ Scribed by David, M. L.; Pailloux, F.; Babonneau, D.; Drouet, M.; Barbot, J. F.; Simoen, E.; Claeys, C.

• Book ID: 126838841
• Publisher: American Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 554 KB
• Volume: 102
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2803715