The effect of stoichiometry on sputtering deuterium retention and surface damage in titanium carbide films: M Kitajima et al,Thin Solid Films,156, 1988, 231–238

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 152 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90756-2