The effect of stoichiometry on sputtering, deuterium retention and surface damage in titanium carbide films

✍ Scribed by M. Kitajima; T. Noda; M. Okada

• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 375 KB
• Volume: 156
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(88)90316-1