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The effect of SR x-ray lithography on MOS gate oxide and 0.5μm p-channel MOSFET's

✍ Scribed by U. Mackens; A.J. Walker

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Radiation damage and its effect on hot-c

✍ C. C. H. Hsu; L. K. Wang; J. Y. C. Sun; M. R. Wordeman; T. H. Ning 📂 Article 📅 1990 🏛 Springer US 🌐 English ⚖ 501 KB