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The effect of neutron irradiation on the properties of SiC and SiC(N) layer prepared by plasma enhanced chemical vapor deposition

✍ Scribed by Huran, Jozef; Valovič, Albín; Boháček, Pavol; Shvetsov, Valery N.; Kobzev, Alexander P.; Borzakov, Sergey B.; Kleinová, Angela; Sekáčová, Mária; Arbet, Juraj; Sasinková, Vlasta

Book ID
123331671
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
689 KB
Volume
269
Category
Article
ISSN
0169-4332

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