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The effect of ion energy on the deposition of amorphous carbon phosphide films

✍ Scribed by Pearce, S.R.J.; Filik, J.; May, P.W.; Wild, R.K.; Hallam, K.R.; Heard, P.J.

Book ID: 122475543
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 87 KB
Volume: 12
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(02)00371-0

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