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The effect of ion assistance on the operating characteristics of optical coatings

✍ Scribed by Gainutdinov, I. S.; Mustaev, R. M.; Mikhailov, A. V.; Gusev, A. G.

Book ID
115400856
Publisher
Optical Society of America
Year
2001
Tongue
English
Weight
49 KB
Volume
68
Category
Article
ISSN
1070-9762

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## Abstract Carbon films are deposited on silica glass fibers by radio‐frequency plasma‐enhanced chemical vapor deposition (rf‐PECVD), and the properties of these optical fibers are improved by rapid thermal annealing. The annealing temperatures are set to 100, 200, 300, 400, 500, 550, 600, and 700