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The effect of hydrogen content on the properties of reactively sputtered amorphous SiH

✍ Scribed by F.R. Jeffrey; H.R. Shanks; G.C. Danielson


Book ID
118331422
Publisher
Elsevier Science
Year
1980
Tongue
English
Weight
318 KB
Volume
35-36
Category
Article
ISSN
0022-3093

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