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The effect of heavy doping on the diffusion of impurities in silicon

✍ Scribed by MichaelF. Millea

Publisher
Elsevier Science
Year
1965
Tongue
English
Weight
124 KB
Volume
3
Category
Article
ISSN
0038-1098

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Redistribution of Heavy Metal Impurities
Redistribution of Heavy Metal Impurities in Silicon by Phosphorus Diffusion
✍ D. Knoll; A. Fischer πŸ“‚ Article πŸ“… 1982 πŸ› John Wiley and Sons 🌐 English βš– 401 KB πŸ‘ 1 views

## Abstract Based on a model for redistributing heavy metals in two‐phase‐silicon an expression is obtained, describing the intensity of redistribution, being determined by the segregation coefficient between intrinsic and phosphorus‐doped silicon and the spatial extension of the phosphorus phase.