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The effect of growth conditions and N2/O2ambient on LO-phonon replicas during epitaxial growth of ZnO on c-sapphire

✍ Scribed by Joaquín A. Aparicio; Félix E. Fernández

Publisher
Springer
Year
2010
Tongue
English
Weight
511 KB
Volume
45
Category
Article
ISSN
0022-2461

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## Abstract An on‐line measurement of optical emission spectrum (OES) was used to study the variation of Zn and O components in the plasma of ZnO film growth with reactive radio‐frequency magnetron sputtering method. It was found that the decline of all the Zn emission lines shows three different s