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Growth and characterization of ZnO films on (11-20) sapphire substrates by atomic layer deposition using DEZn and N2O

✍ Scribed by Kuo-Yi Yen; Kuang-Pi Liu; Jyh-Rong Gong; Kuen-Yau Tsai; Dong-Yuan Lyu; Tai-Yuan Lin; Guo-Yu Ni; Far-Wen Jih

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